Black silicon significantly enhances phosphorus diffusion gettering
نویسندگان
چکیده
منابع مشابه
Phosphorus and boron diffusion gettering of iron in monocrystalline silicon
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متن کاملModeling phosphorus diffusion gettering of iron in single crystal silicon
All material supplied via Aaltodoc is protected by copyright and other intellectual property rights, and duplication or sale of all or part of any of the repository collections is not permitted, except that material may be duplicated by you for your research use or educational purposes in electronic or print form. You must obtain permission for any other use. Electronic or print copies may not ...
متن کاملPhosphorus diffusion gettering process of multicrystalline silicon using a sacrificial porous silicon layer
The aims of this work are to getter undesirable impurities from low-cost multicrystalline silicon (mc-Si) wafers and then enhance their electronic properties. We used an efficient process which consists of applying phosphorus diffusion into a sacrificial porous silicon (PS) layer in which the gettered impurities have been trapped after the heat treatment. As we have expected, after removing the...
متن کاملImproved iron gettering of contaminated multicrystalline silicon by high temperature phosphorus diffusion
The efficacy of higher-temperature gettering processes in reducing precipitated iron concentrations is assessed by synchrotron-based micro-X-ray fluorescence. By measuring the same grain boundary before and after phosphorus diffusion in a set of wafers from adjacent ingot heights, the reduction in size of individual precipitates is measured as a function of gettering temperature in samples from...
متن کاملMain defect reactions behind phosphorus diffusion gettering of iron
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2018
ISSN: 2045-2322
DOI: 10.1038/s41598-018-20494-y